Semiconductor memory device

ABSTRACT

The present invention provides a semiconductor memory device that includes: a fuse circuit having multiple fuse elements; and a fuse selection circuit connected to an internal address signal line that receives an address signal externally inputted. The fuse circuit is connected to the fuse selection circuit to receive an output from the fuse selection circuit, is supplied with an externally inputted trigger signal that permits nonvolatile recording of the fuse elements, and, in response to the output and the trigger signal, records the fuse element corresponding to the internal address signal line among the plurality of fuse elements while recording at least one of the plurality of fuse elements other than the fuse element thus recorded.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor memory device, and particularly relates to a semiconductor device the failure of which can be redressed based on a test result.

2. Description of the Related Art

In recent years, a semiconductor memory device has become smaller and grown in capacity, and needs to be subjected to a screening test several times. In the conduct of the screening test, a semiconductor memory device has conventionally been redressed through replacement of a separately-arising defective memory cell with a spare memory cell by fuse cutting (such a redress technique is hereinafter referred to as replacement redress). To carry out such replacement redress several times, however, addition and review of a test circuit and addition of a dedicated signal line for controlling replacement redress are required. Consequently, a chip size becomes larger, which results in a cost increase. What is needed to avoid this is a several-time replacement redress circuit not requiring external control and operations. A conventional semiconductor memory device having a replacement redress circuit is described in Japanese Patent Application Publication No. 2001-23393, for example.

FIG. 6 is a block diagram for explaining a configuration of a conventional replacement control circuit 24. The replacement control circuit 24 includes a complementary address generation circuit 42, a fuse selection circuit 44, a replacement address setting circuit 46, and a decoder deactivation circuit 48. The complementary address generation circuit 42 receives a fuse selection address signal BSEL provided to select a fuse for storing an address to be replaced, outputs the signal as it is upon a first conduct of replacement, and outputs a complementary address upon a second conduct of replacement. The fuse selection circuit 44 outputs a fuse selection signal BSIG in response to the output from the complementary address generation circuit 42 and an address strobe signal /AS. The replacement address setting circuit 46 outputs a spare selection signal SPSEL in response to an address signal AD externally inputted and the fuse selection signal BSIG. The decoder deactivation circuit 48 deactivates a main address decoder 50 when the spare selection signal SPSEL is activated. When the spare selection signal SPSEL is activated, a spare address decoder 54 decodes the spare selection signal SPSEL and activates a corresponding spare memory cell 56.

FIG. 7 is a circuit diagram showing a configuration of the complementary address generation circuit 42 in FIG. 6. The complementary address generation circuit 42 has a circuit 42#0 and a circuit 42#1. The circuit 42#0 outputs a signal BSEL0 a upon receipt of a fuse selection address signal BSEL0, and the circuit 42#1 outputs a signal BSEL1 a upon receipt of a fuse selection address signal BSEL1. The circuit 42#0 has: an n-channel MOS transistor 68 that is activated upon receipt of an identification. signal SID at a gate thereof when first redundancy replacement is complete and conveys a high voltage BV to a node N1; a resistor 67 that is connected between a power node to which a power supply potential Vcc is provided and the node N1; and an antifuse 66 that is connected between the node N1 and a ground node. The antifuse is a type of electrical fuse and has a property of becoming conductive between electrodes by being blown. In other words, the antifuse 66 becomes conductive when the high voltage BV is applied to the node N1, which causes the node N1 to have the approximately same potential as the ground node. Hence, the node N1 is at the H level before a first fuse blowing, but is at the L level after the first fuse blowing. To be more specific, the node N1 is at the L level when a second fuse blowing is needed as a result of a subsequent test performed after undergoing operational states such as normal read/write operations, other test operations, standby mode or shut-down after leaving replacement redress mode. The circuit 42#0 further has: an n-channel MOS transistor 62 being connected between nodes N2 and N3 and having a gate connected to the node N1; an inverter 70 that receives and reverses the fuse selection address signal BSEL0 provided to the node N2 and outputs the reversed fuse selection address signal BSEL0 to a node N4; and a p-channel MOS transistor 64 being connected between the nodes N4 and N3 and having a gate connected to the node N1.

The node N3 outputs the signal BSEL0 a being the output of the complementary address generation circuit 42. FIG. 7 shows only the fuse selection address signal BSEL0 in detail; however, in the similar way, the similar circuit 42#1 is provided with the fuse selection address signal BSEL1 and outputs the signal BSEL1 a correspondingly. Since the node N1 is at the H level when the first fuse blowing is to be performed, the n-channel MOS transistor 62 is conductive, and therefore the fuse selection address signal BSEL0 provided to the node N2 is conveyed to the node N3 as it is. On the other hand, since the node N1 is at the L level when the second fuse blowing is to be performed as described before, the n-channel MOS transistor 62 is nonconductive, and therefore the p-channel MOS transistor 64 connected between the nodes N4 and N3 becomes conductive instead. Consequently, the fuse selection address signal BSEL0 is reversed by the inverter 70.

FIG. 8 is a circuit diagram showing a configuration of the fuse selection circuit 44 in FIG. 6. The fuse selection circuit 44 has: a fuse selection decoder 82 that receives and decodes the signals BSEL0 a and BSEL1 a, which are the output signals of the complementary address generation circuit 42; an inverter 84 that receives and reverses the strobe signal /AS of a row or column address; a NOR circuit 86 that outputs a fuse selection signal BSIG0 upon receipt of an output signal BSIG0 a of the fuse selection decoder 82 and the output signal of the inverter 84; a NOR circuit 88 that outputs a fuse selection signal BSIG1 upon receipt of an output signal BSIG1 a of the fuse selection decoder 82 and the output signal of the inverter 84; a NOR circuit 90 that outputs a fuse selection signal BSIG2 upon receipt of an output signal BSIG2 a of the fuse selection decoder 82 and the output signal of the inverter 84; and a NOR circuit 92 that outputs a fuse selection signal BSIG3 upon receipt of an output signal BSIG3 a of the fuse selection decoder 82 and the output signal of the inverter 84. The fuse selection decoder 82 receives and decodes the signals BSEL0 a and BSEL1 a, and activates any one of the output signals BSIG0 a to BSIG3 a. The NOR circuits 86 to 92 activate all the fuse selection signals BSIG0 to BSIG3 upon activation of the strobe signal /AS when a row or column address is externally inputted. When the strobe signal /AS is deactivated, the NOR circuits 86 to 92 output, as the fuse selection signals BSIG0 to BSIG3, the signals BSIG0 a to BSIG3 a decoded in response to the fuse selection address signal BSEL externally provided.

As described above, the conventional technology requires a replacement information holding circuit to have a circuit which changes a selected fuse set when replacement redress is necessary. Moreover, the replacement information holding circuit also requires a special control circuit and control procedure for storing, in a nonvolatile manner, a fact that a first replacement redress process has been carried out and completed after completing replacement redress for the required number of defective word and bit lines, and the like, as the first replacement redress. Since circuits to be added in this manner are repeatedly placed for each required replacement redress, a chip size increases and the control procedure becomes more complicated.

SUMMARY OF THE INVENTION

A semiconductor memory device of an aspect of the present invention is configured including: a fuse circuit having multiple fuse elements; and a fuse selection circuit connected to an internal address signal line that receives an address signal externally inputted. The fuse circuit is connected to the fuse selection circuit to receive an output from the fuse selection circuit, is supplied with an externally inputted trigger signal that permits nonvolatile recording of the fuse elements, and, in response to the output and the trigger signal, records the fuse element corresponding to the internal address signal line among the plurality of fuse elements while recording at least one of the plurality of fuse elements other than the fuse element thus recorded.

Such a configuration eliminates the need for a dedicated replacement information holding circuit and a dedicated fuse selection circuit as well as a control procedure using a fuse selection address signal, which have been conventionally necessary. Accordingly, it is possible to securely hold replacement information and implement several-time replacement, with a simple configuration.

According to the embodiment, it is made possible to configure a semiconductor memory device capable of accurately performing a replacement process several times with a simple circuit and a simple control procedure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an entire block diagram showing a configuration of a first embodiment.

FIG. 2 is a replacement control circuit diagram of the first embodiment.

FIG. 3 is a fuse circuit diagram of the first embodiment.

FIG. 4 is a replacement address setting circuit diagram of the first embodiment.

FIG. 5 is a replacement control circuit diagram showing a configuration of a second embodiment.

FIG. 6 is a block diagram of a conventional replacement control circuit.

FIG. 7 is a diagram of a conventional complementary address generation circuit.

FIG. 8 is a diagram of a conventional fuse selection circuit.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Specific examples of embodiments will hereinafter be described with reference to the drawings. All of the following descriptions are one of examples, and do not limit the present invention of the application. Those skilled in the art can understand and carry out the present invention in an aspect with appropriate changes and addition within the scope of the present invention of the application.

FIG. 1 is a block diagram showing a configuration of a first embodiment. A semiconductor memory device of the present invention includes a replacement control circuit 10 which further includes a fuse selection circuit 20 and a fuse circuit 21, a replacement address setting circuit 400, a decoder deactivation circuit 410, a main address decoder 420, a main memory cell 12, and a spare memory cell 11. Address signals A0 and A1 inputted externally are connected to the fuse selection circuit 20 of the replacement control circuit 10, the replacement address setting circuit 400, and the main address decoder 420. A cut trigger signal 204 inputted externally is connected to the fuse circuit 21. The fuse selection circuit 20 and the fuse circuit 21 of the replacement control circuit 10 are connected to each other with cut selection signals 250 a to 250 c, 251 a to 251 c, 252 a to 252 c, and 253 a to 253 c. Enable fuse signals 230 c to 233 c are connected to the fuse selection circuit 20, and output signals 230 a to 230 c, 231 a to 231 c, 232 a to 232 c, and 233 a to 233 c are connected to the replacement address setting circuit 400. Output signals RWL0 to 3 of the replacement address setting circuit 400 are connected to the decoder deactivation circuit 410 and the spare memory cell 11. An output signal 411 of the decoder deactivation circuit 410 is connected to the main address decoder 420. Output signals WL0 to 3 of the main address decoder 420 are connected to the main memory cell 12.

FIG. 2 is a circuit diagram of the fuse selection circuit 20 and a block diagram of the fuse circuit 21, both of which configure the replacement control circuit 10 in FIG. 1. FIG. 2 is configured of fuse selection circuits 250, 251, 252, and 253, and circuit blocks 220, 221, 222 and 223. The circuit blocks 220 to 223 are configured of fuse circuits 220 a to 220 c, 221 a to 221 c, 222 a to 222 c, and 223 a to 223 c, respectively. The fuse selection circuit 250 is configured of two-input AND circuits 240 a and 240 b and an inverter circuit 260. The fuse selection circuit 251 is configured of two-input AND circuits 241 a and 241 b, a two-input NOR circuit 261, and a two-input OR circuit 271. The fuse selection circuit 252 is configured of two-input AND circuits 242 a and 242 b, a two-input NOR circuit 262, and a two-input OR circuit 272. The fuse selection circuit 253 is configured of two-input AND circuits 243 a and 243 b, and a two-input NOR circuit 263. The address signals A0 and A1 externally inputted to the fuse selection circuit 250 and the circuit block 220 are connected to the two-input AND circuits 240 a and 240 b, respectively. The cut trigger signal 204 is connected to the fuse circuits 220 a to 220 c. The outputs 250 a and 250 b of the two-input AND circuits 240 a and 240 b are connected to the fuse circuits 220 a and 220 b, respectively. The enable fuse signal 230 c is connected to the inverter 260, and the output 250 c is connected to the two-input AND circuits 240 a and 240 b, the fuse circuit 220 c, and the two-input NOR circuit 261 and the two-input OR circuit 271 of the fuse selection circuit 251.

The address signals A0 and A1 inputted to the fuse selection circuit 251 and the circuit block 221 are connected to the two-input AND circuits 241 a and 241 b, respectively. The cut trigger signal 204 is connected to the fuse circuits 221 a to 221 c. The outputs 251 a and 251 b of the two-input AND circuits 241 a and 241 b are connected to the fuse circuits 221 a and 221 b, respectively. The enable fuse signal 231 c is connected to the two-input NOR signal 261. The output 251 c is connected to the two-input AND circuits 241 a and 241 b, the fuse circuit 221 c, and the two-input OR circuit 271. An output 281 of the two-input OR circuit 271 is connected to the two-input NOR circuit 262 and the two-input OR circuit 272 of the fuse selection circuit 252.

The address signals A0 and A1 inputted to the fuse selection circuit 252 and the circuit block 222 are connected to the two-input AND circuits 242 a and 242 b, respectively. The cut trigger signal 204 is connected to the fuse circuits 222 a to 222 c. The outputs 252 a and 252 b of the two-input AND circuits 242 a and 242 b are connected to the fuse circuits 222 a and 222 b, respectively. The enable fuse signal 232 c is connected to the two-input NOR circuit 262. The output 252 c is connected to the two-input AND circuits 242 a and 242 b, the fuse circuit 222 c, and the two-input OR circuit 272. An output 282 of the two-input OR circuit 272 is connected to the two-input NOR circuit 263 of the fuse selection circuit 253.

The address signals A0 and A1 inputted to the fuse selection circuit 253 and the circuit block 223 are connected to the two-input AND circuits 243 a and 243 b, respectively. The cut trigger signal 204 is connected to the fuse circuits 223 a to 223 c. The outputs 253 a and 253 b of the two-input AND circuits 243 a and 243 b are connected to the fuse circuits 223 a and 223 b, respectively. The enable fuse signal 233 c is inputted to the two-input NOR circuit 263, and an output 253 c is connected to the two-input AND circuits 243 a and 243 b and the fuse circuit 223 c.

Next, descriptions will be given of a configuration of the block 220 holding a first replacement address.

The block 220 is configured of the three fuse circuits 220 a, 220 b and 220 c. The fuse circuit 220 a is connected with the A0 cut selection signal 250 a from the block 250 and the cut trigger signal 204, and outputs the A0 address fuse signal 230 a. The fuse circuit 220 b is connected with the A1 cut selection signal 250 b from the block 250 and the cut trigger signal 204, and outputs the A1 address fuse signal 230 b. The fuse circuit 220 c is connected with the fuse use ban signal 250 c from the block 250 and the cut trigger signal 204, and outputs the enable fuse signal 230 c. A configuration of the block 221 holding a second replacement address is the same as the first one. The block 221 has the fuse circuits 221 a, 221 b and 221 c, and outputs the A0 address fuse signal 231 a, the A1 address fuse signal 231 b, and the enable fuse signal 231 c, respectively. A configuration of the block 222 holding a third replacement address is the same as the first one. The block 222 has the fuse circuits 222 a, 222 b, and 222 c, and outputs the A0 address fuse signal 232 a, the A1 address fuse signal 232 b, and the enable fuse signal 232 c, respectively. A configuration of the block 223 holding a fourth replacement address is the same as the first one. The block 223 has the fuse circuits 223 a, 223 b, and 223 c, and outputs the A0 address fuse signal 233 a, the A1 address fuse signal 233 b, and the enable fuse signal 233 c, respectively.

FIG. 3 is a detailed circuit diagram of the fuse circuit block 21.

The block 21 is configured of the blocks 220 to 223. The block 220 is configured of the fuse circuits 220 a to 220 c which are configured of two-input AND circuits 300 a to 300 c, n-channel transistors 320 a to 320 c, electric fuses 310 a to 310 c, high resistors 330 a to 330 c, and inverters 350 a to 350 c, respectively. In the fuse circuit 220 a, the cut selection signal 250 a and the cut trigger signal 204 are connected to the two-input AND circuit 300 a, and the output is connected to a gate of the n-channel transistor 320 a. A source of the n-channel transistor 320 a is connected to GND, and a drain node 340 a is connected to the electric fuse 310 a, the high resistor 330 a, and the inverter 350 a. The electric fuse 310 a is connected to the node 340 a and the power supply VCC. The high resistor 330 a is connected to the node 340 a and GND. Internal connection relations in the fuse circuits 220 b and 220 c are the same as that of the fuse circuit 220 a. In addition, the internal configurations and the connection relations of the blocks 221 to 223 are the same as the block 220.

FIG. 4 is a detailed circuit diagram of the replacement address setting circuit 400, a circuit diagram of the decoder deactivation circuit 410, and a block diagram of the main address decoder 420.

The replacement address setting circuit 400 is configured of a three-input AND circuit 460, two-input XNOR circuits 450 a and 450 b, a three-input AND circuit 461, two-input XNOR circuits 451 a and 451 b, a three-input AND circuit 462, two-input XNOR circuits 452 a and 452 b, a three-input AND circuit 463, and two-input XNOR circuits 453 a and 453 b.

The address input A0 and the address fuse signals 230 a, 231 a, 232 a, and 233 a are connected to the two-input XNOR circuits 450 a, 451 a, 452 a, and 453 a, respectively. The address input A1 and the address fuse signals 230 b, 231 b, 232 b, and 233 b are connected to the two-input XNOR circuits 450 b, 451 b, 452 b, and 453 b, respectively. The outputs of the two-input XNOR circuits 450 a and 450 b and the enable fuse signal 230 c are connected to the three-input AND circuit 460. The outputs of the two-input XNOR circuits 451 a and 451 b and the enable fuse signal 231 c are connected to the three-input AND circuit 461. The outputs of the two-input XNOR circuits 452 a and 452 b and the enable fuse signal 232 c are connected to the three-input AND circuit 462. The outputs of the two-input XNOR circuits 453 a and 453 b and the enable fuse signal 233 c are connected to the three-input AND circuit 463. The outputs RWL0 to 3 of the three-input AND circuits 460 to 463 are connected to a four-input NOR circuit 412 of the decoder deactivation circuit 410. The main address decoder 420 is connected to the address inputs A0 and A1, and the output 411 of the four-input NOR circuit 412 from the decoder deactivation circuit 410.

Descriptions will be given of several-time replacement operations of the present invention with reference to FIGS. 1, 2, 3 and 4.

The block 250 of the fuse selection circuit 20 receives the enable fuse signal 230 c and the address signals A0 and A1 externally inputted and outputs the cut selection signals 250 a to 250 c to the fuse circuit 21. The block 220 of the fuse circuit 21 takes the cut selection signals 250 a to 250 c and the cut trigger signal 204 as inputs and cuts a fuse selected by the cut selection signals 250 a to 250 c based on a one-shot high level input of the cut trigger signal 204. The output signals 230 a to 230 c of the block 220 are further connected to the replacement address setting circuit 400, too. As the above-mentioned blocks 250 and 220, the blocks 251 to 253 output the cut selection signals 251 a to 251 c, 252 a to 252 c, and 253 a to 253 c, and the blocks 221 to 223 output the output signals 231 a to 231 c, 232 a to 232 c, and 233 a to 233 c. The output signals 230 a to 230 c, 231 a to 231 c, 232 a to 232 c, 233 a to 233 c are compared with the address signals A0 and A1. If they agree with each other, one of the replacement address signals RWL0 to 3 is outputted at the high level, and the other signals is outputted at the low level. These signals are connected to the spare memory cell 11. Furthermore, the replacement address signals RWL0 to 3 are also inputted to the decoder deactivation circuit 410. If anyone of the replacement address signals RWL0 to 3 is at the high level, the output signal 411 of the decoder deactivation circuit 410 is inputted as a non-selection signal to the main address decoder 420. Thereby, all the main address decoding signals WL0 to 3 are outputted at the low level, and the main memory cell 12 is put in a non-select state. If the replacement address signals RWL0 to 3 are all at the low level, the output signal 411 of the decoder deactivation circuit 410 is outputted at the high level. The main address decoder 420 receives the address signals A0 and A1 and outputs any one of the main address decoding signals WL0 to 3 at the high level.

Firstly, descriptions will be given of operations performed when a memory cell selected by the address signal (A0, A1)=(0, 1) fails in a first test. In this case, the semiconductor memory device in the embodiment inputs the address signal (A0, A1)=(0, 1) as the operations of the replacement redress mode state in the fuse selection circuit 20 in FIG. 2. Moreover, the cut trigger signal 204 is set to an initial value of the low level. The fuse circuit 220 holding a first replacement address is not cut in an initial state; therefore, the enable fuse signal 230 c is outputted at the low level, and the fuse use ban signal 250 c is outputted at the high level (cut permission). The two-input AND circuit 300 c of the fuse circuit 220 and the two-input AND circuits 240 a and 240 b of the fuse selection circuit 250 are put in a select state. Since (A0, A1)=(0, 1) is inputted, the output signal 250 a is at the low level, the output signal 250 b is at the high level. Accordingly, the two-input AND circuits 300 a and 300 b are put in the non-select state and the select state, respectively. Then, when the cut trigger signal 204, being a permission signal to permit a fuse cut, transits to the high level at one shot, the n-channel transistors 320 b and 320 c selected by the two-input AND circuits 300 b and 300 c are switched on, responding to the transition in common. Accordingly, current flows through the electric fuses 310 b and 310 c, and the fuses are cut. As a result, the potential of the nodes 340 b and 340 c is at the low level afterwards.

Cutting a fuse for redressing a defective cell for the address signal (A0, A1)=(0, 1) has been shown as the first replacement redress process in this example. If two or more address signals need to be redressed, the same fuse cutting may be repeated, and each fuse cutting may be set as the first replacement redress process. Furthermore, the fuse element 310 c that execute a program by being electrically cut, and the like are used in this example. Alternatively, it is also possible to use an antifuse element that is insulated in the initial state and becomes electrically conductive by feeding a large current. In this case, contrary to the example described here, the potential of the node 340 c and the like of when replaced and when not replaced is at the low level at the beginning and is at the high level upon execution of the program. Therefore, the same circuit operations can be performed if the logic levels of the signal 230 c and the like are set to be the same as the above example by appropriately making changes such as increasing the numbers of stages of the inverter 350 c and the like.

The semiconductor memory device of the embodiment can perform normal read/write operations after completing the first fuse cutting in this manner and leaving the replacement redress mode, it is possible to perform normal reading/writing in response to external access to a replaced defective address by selecting a specific spare cell among spare cells after replacement. Moreover, after the first test or the first replacement redress, the semiconductor memory device can normally operate during any of operational states including other test operations, standby mode and shut-down. In this case, the fuse 310 c and the like store replacement states in a nonvolatile manner; therefore, the memory of the replacement states will not be lost by the operational states such as the shut-down of the semiconductor device.

Next, descriptions will be given of operations performed when a memory cell selected by the address signal (A0, A1)=(0, 0) and (1, 0) fails in a second test. Since the electric fuse 310 c is cut in the first test and the node 340 c is at the low level due to the high resistor 330 c with a resistance value of several KΩ to several MΩ, the enable fuse signal 230 c of the fuse circuit 220 c is outputted at the high level through the inverter 350 c. Moreover, the fuse use ban signal 250 c is outputted at the low level (cut ban). Consequently, the A0 and A1 cut selection signals 250 a and 250 b are also at the low level, and the fuse circuit 220 is put in the non-select state. Thereby, redundant fuse cutting is avoided. Since the electric fuse 311 c is not cut, the enable fuse signal 231 c of the second fuse circuit 221 is outputted at the high level and inputted to the two-input NOR circuit 261 of the fuse selection circuit 251 together with the fuse use ban signal 250 c. The fuse use ban signal 251 c is outputted at the high level (cut permission). The two-input AND circuits 241 a and 241 b are put in the select state. However, since the address signal (A0, A1) (0, 0), the outputs 251 a and 251 b are at the low level, and the fuse use ban signal 251 c is inputted at the high level to the fuse circuits 221 a, 221 b, and 221 c. If the cut trigger signal 204 transits to the high level at one shot, only the electric fuse for the fuse circuit 221 c is selected and cut. Then, the fuse circuit outputs 231 a and 231 b are outputted at the low level, and the enable fuse signal 231 c is outputted at the high level. Since the enable fuse signal 231 c is at the high level, the fuse use ban signal 251 c is at the low level. Then, the two-input NOR circuit 261 is inputted, together with the fuse use ban signal 250 c (low level), to the two-input OR circuit 271. The output 281 is at the low level. Next, when the address signal (A0, A1)=(1, 0) is inputted, the two-input AND circuits 242 a and 242 b in the third fuse circuit 252 are selected. Then, the A0 cut selection signal 252 a is at the high level, and the A1 cut selection signal 252 b is at the low level. In the fuse circuits 222 a, 222 b and 222 c, when the cut trigger signal 204 is at the high level at one shot, electric fuses for 222 a and 222 c are selected. Then, the outputs 232 a and 232 b and the enable fuse signal 232 c are outputted at the high level, the low level, and the high level, respectively.

At this point, when the A0 address fuse signal 230 a and the A1 address fuse signal 230 b agree with the external address signals A0 and A1 and the enable fuse signal 230 c is at the high level in the replacement address setting circuit 400 in FIG. 4, the three-input AND circuit 460 is outputted at the high level, and sets RWL0 as a replacement address. Additionally, RWL0 is inputted to a four-input NOR circuit of the decoder deactivation circuit 410, and the output 411 is outputted at the low level. The output 411 is inputted to the main address decoder 420 to set the decoding signals WL0 to 3 of the external address signals A0 and A1 to non-select (low level). With respect to the replacement address setting circuit 400, the A0 address fuse signals 231 a, 232 a and 233 a, and the A1 address fuse signals 231 b, 232 b and 233 b, which hold the second to fourth replacement address, respectively, and the enable fuse signals 231 c, 232 c and 233 c, are inputted similarly to the ones from the first block 220. When the respective signals agree with the external addresses A0 and A1, and the enable fuse signals 231 c, 232 c, and 233 c are at the high level respectively, the replacement address signals RWL1 to 3 are set by the three-input AND circuits 461, 462 and 463. The output signal 411 of the decoder deactivation circuit 410 is at the low level, and the output signals WL0 to 3 of the main address decoder 420 are set to the non-select low level. The representation of (0, 1) in the above descriptions indicates (low level, high level).

As described above, in the illustrated several-time replacement control circuit, the cut/non-cut state output of a fuse circuit used for replacement redress is used as a fuse use ban signal. A fuse circuit used for replacement redress has a cut-state memory element that is cut by commonly responding to the cut trigger signal being a cut permission signal for cutting a fuse in relation to an address to be replaced, and generates a cut/non-cut state output. In addition, it is configured so that an OR of the fuse use ban signal and the fuse use ban signal of the selected fuse circuit, of a previous stage, is passed to a following stage. Accordingly, without any special dedicated fuse circuit, a fuse circuit in the following stage is selected only when all the fuse circuits in the previous stages are banned for use (have already been used). Consequently, a dedicated replacement information holding circuit, fuse selection circuit, and fuse selection address signal, which have all been necessary in the conventional example, are no longer necessary.

A second embodiment has a configuration in which an SR latch circuit to latch address signals A0 and A1, and an enable fuse signal is added to the configuration in FIG. 2 of the first embodiment. The other different point is to use, as a latch trigger signal, a one-shot judgment signal that uses a memory test pass/fail judgment result by BIST. FIG. 5 is a replacement control circuit diagram showing the second embodiment of the present invention.

The replacement control circuit of the second embodiment has the fuse selection circuit 20 and the fuse circuit 21 configured of fuse selection circuits 260, 261, 262, and 263, and circuit blocks 220, 221, 222, and 223, respectively. The circuit blocks 220 to 223 are configured of fuse circuits 220 a to 220 c, 221 a to 221 c, and 223 a to 223 c, respectively. The fuse selection circuit 260 is configured of two-input AND circuits 270 a, 270 b, and 500, a two-input NOR circuit 540, a two-input OR circuit 270 c, and SR latch circuits 520 a to 520 c. The fuse selection circuit 261 is configured of two-input AND circuits 271 a, 271 b and 501, a three-input NOR circuit 541, two-input OR circuits 271 c and 544, and SR latch circuits 521 a to 521 c. The fuse selection circuit 262 is configured of two-input AND circuits 272 a, 272 b, and 502, a three-input NOR circuit 542, two-input OR circuits 272 c and 545, and SR latch circuits 522 a to 522 c. The fuse selection circuit 263 is configured of two-input AND circuits 273 a, 273 b and 503, a three-input NOR circuit 543, a two-input OR circuit 273 c, and SR latch circuits 523 a to 523 c.

The address signal A0 externally inputted is connected to the two-input AND circuits 270 a, 271 a, 272 a and 273 a. The address signal A1 is connected to the two-input AND circuits 270 b, 271 b, 272 b, and 273 b. A cut trigger signal 204 is connected to the fuse circuits 220 a to 220 c, 221 a to 221 c, 222 a to 222 c, and 223 a to 223 c. A reset signal 560 is connected to a reset side of the SR latch circuits 520 a to 520 c, 521 a to 521 c, 522 a to 522 c, and 523 a to 523 c, and a one-shot judgment signal 570 is connected to the two-input AND circuits 500, 501, 502 and 503.

The fuse selection circuit 260 and the fuse circuit 220 hold a first replacement address; The fuse selection circuit 261 and the fuse circuit 221 hold a second replacement address; the fuse selection circuit 262 and the fuse circuit 222 hold a third replacement address; and the fuse selection circuit 263 and the fuse circuit 223 hold a fourth replacement address. In the fuse selection circuit 260 and the circuit block 220, outputs 540 a to 540 c of the two-input AND circuits 270 a and 270 b and the two-input OR circuit 270 c are inputted to set sides of the SR latch circuits 520 a to 520 c, and outputs 530 a to 530 c are connected to the fuse circuits 220 a to 220 c, respectively. The SR latch circuit 520 c is connected to the two-input NOR circuit 540 and the two-input OR circuit 270 c. An output enable fuse signal 230 c of the fuse circuit 220 c, together with the output 530 c of the SR latch circuit 520 c, is connected to the two-input NOR circuit 540. An output 550 is connected to the two-input AND circuit 500, and the three-input NOR circuit 541 and the two-input OR circuit 544 of the fuse selection circuit 261. An output 510 of the two-input AND circuit 500 is connected to the two-input AND circuits 270 a and 270 b and the two-input OR circuit 270 c. In the fuse selection circuit 261 and the fuse block 221, outputs 541 a to 541 c of the two-input AND circuits 271 a and 271 b and the two-input OR circuit 271 c are inputted to-set sides of the SR latch circuits 521 a to 521 c, and outputs 531 a to 531 c are connected to the fuse circuits 221 a to 221 c, respectively. The SR latch circuit 521 c is connected to the three-input NOR circuit 541 and the two-input OR circuit 271 c. An output enable fuse signal 231 c of the fuse circuit 221 c, together with the output 531 c of the SR latch circuit 521 c, is connected to the three-input NOR circuit 541. An output 551 is connected to the two-input AND circuit 501 and the two-input OR circuit 544, and an output 546 of the two-input OR circuit 544 is connected to the three-input NOR circuit 542 and the two-input OR circuit 545 of the fuse selection circuit 262. An output 511 of the two-input AND circuit 501 is connected to the two-input AND circuits 271 a and 271 b, and the two-input OR circuit 271 c. In the fuse selection circuit 262 and the circuit block 222, outputs 542 a to 542 c of the two-input AND circuits 272 a and 272 b, and the two-input OR circuit 272 c are connected to set sides of the SR latch circuits 522 a to 522 c, and outputs 532 a to 532 c are connected to the fuse circuits 222 a to 222 c, respectively. The SR latch 522 c is connected to the three-input NOR circuit 542 and the two-input OR circuit 272 c. An output enable fuse signal 232 c of the fuse circuit 222 c, together with the output 532 c of the SR latch circuit 522 c, is connected to the three-input NOR circuit 542. An output 552 is connected to the two-input AND circuit 502 and the two-input OR circuit 545, and output 547 of the two-input OR circuit 545 is connected to the three-input NOR circuit 543 of the fuse selection circuit 263. An output 512 of the two-input AND circuit 502 is connected to the two-input AND circuits 272 a and 272 b, and the two-input OR circuit 272 c.

In the fuse selection circuit 263 and the circuit block 223, outputs 543 a to 543 c of the two-input AND circuits 273 a and 273 b, and the two-input OR circuit 273 c are inputted to set sides of the SR latch circuits 523 a to 523 c, and their outputs 533 a to 533 c are connected to the fuse circuits 223 a to 223 c, respectively. The SR latch circuit 523 c is connected to the three-input NOR circuit 543 and the two-input OR circuit 273 c. An output enable fuse signal 233 c of the fuse circuit 223 c, together with the output 533 c of the SR latch circuit 523 c, is connected to the three-input NOR circuit 543. An output 553 is connected to the two-input AND circuit 503. An output 513 of the two-input AND circuit 503 is connected to the two-input AND circuits 273 a and 273 b, and the two-input OR circuit 273 c. The fuse circuits 220 to 223 have the same configurations as the first embodiment.

Descriptions will be given of several-time replacement operations of the second embodiment with reference to FIG. 5.

Firstly, descriptions will be given of operations performed when a memory cell selected by an address signal (A0, A1)=(0, 1) fails in a first test. As an initial operation, a one-shot high level is outputted from the reset signal 560 to reset the SR latch circuits 520 a to 520 c, 521 a to 521 c, 522 a to 522 c, and 523 a to 523 c, and to set the output signals 530 a to 530 c, 531 a to 531 c, 532 a to 532 c, and 533 a to 533 c to the low level. In addition, an electric fuse of the fuse circuit is in a non-cut state, the enable fuse signals 230 c to 233 c are at the low level, and the output 550 of the two-input NOR circuit 540 of the fuse judgment circuit 260 is at the high level. When a memory cell selected by the address signal (A0, A1)=(0, 1) is at the high level, the one-shot judgment signal 570 is at the one-shot high level, the output 510 of the two-input AND circuit 500 is at the high level, the output signal 540 a of the two-input AND circuits 270 a and 270 b for the address signals A0 and A1 are the low level, the output signal 540 b is at the high level, and the output signal 540 c of the two-input OR circuit 270 c is at the high level. The output signal 530 a of the SR latch circuits 520 a, 520 b and 520 c are set at the low level, the output signal 530 b at the high level, and the output signal 530 c at the high level. The two-input AND circuit 300 a is put in a non-select state, 300 b in a select state, and 300 c in the select state. When the cut trigger signal 204 transits to the high level at one shot, n-channel transistors 320 b and 320 c selected by the two-input AND circuits 300 b and 300 c are switched on to feed current through electric fuses 310 b and 310 c, and the fuses are cut.

Next, descriptions will be given of operations performed when a main memory cell selected by the address signals (A0, A1)=(0, 0) and (1, 0) is defective in a second test. Since an electric fuse 310 c is cut in the first test and a node 340 c is at the low level due to a high resistor 330 c, the enable fuse signal 230 c of the fuse circuit 220 c is outputted at the high level through an inverter 350 c. The fuse use ban signal 550 is at the low level (cut ban), and the output 510 is at the low level (cut ban). The A0 and A1 cut selection signals 540 a and 540 b are also at the low level due to the output 510, and the fuse circuit 220 is put in the non-select state. Accordingly, the redundant fuse cutting is avoided. The enable fuse signal 231 c of the second fuse circuit 221 is outputted at the low level since the electric fuse 310 b is not cut, and is inputted to the three-input NOR circuit 541 of the fuse selection circuit 261 together with the output signal 531 c (low level) and the fuse use ban signal 550 (low level). The output 551 is outputted at the high level (cut permission). When the one-shot judgment signal 570 is outputted at a one-shot high level, the output 511 of the two-input AND circuit 501 is at the high level; the output signals 541 a and 541 b of the two-input AND circuits 271 a and 271 b for the address signals A0 and A1 is at the low level; and the output signal 541 c of the two-input OR circuit 271 c is at the high level. Consequently, the output signal 531 a of the SR latch circuits 521 a, 521 b and 521 c is set at the low level, the output signal 531 b at the low level, and the output signal 531 c at the high level. 221 a of the fuse circuit 221 is put in the non-select state, 221 b in the non-select state, and 221 c in the select state. A fuse selected by the cut trigger signal 204 is cut here in FIG. 2 of the first embodiment. In the second embodiment, on the other hand, the cut trigger signal 204 need not be cut until the end of the second test since the 531 a, 531 b and 531 c signals are latched by the SR latch circuits. Next, when a memory cell selected by the address signal (A0, A1)=(1, 0) is at the high level, the signal 546, the enable fuse signal 232 c, and the fuse use ban signal 532 c are inputted all at the low level to the three-input NOR circuit 542 in the fuse circuit 262. Thereby, an output 552 is at the high level. When the one-shot judgment signal 570 is outputted at a one-shot high level, the output 512 of the two-input AND circuit 502 is at the high level, the output signal 542 a of the two-input AND circuits 272 a and 272 b for the address signals A0 and A1 is at the high level, the output signal 542 b is at the low level, and the output signal 542 c of the two-input OR circuit 272 c is at the high level. Then, the output signal 532 a of the SR latch circuits 522 a, 522 b and 522 c is set at the high level, the output signal 532 b at the low level, and the output signal 532 c at the high level.

When the input of the cut trigger signal 204 is changed at the one-shot high level after the end of the second test, fuses selected by the input signals 531 c, 532 a and 532 c are simultaneously cut in the fuse selection circuits 221 and 222.

As described above, a circuit that latches the address A0 and A1 signals and the enable fuse signal is provided in the second embodiment. Thereby, cutting data can be held for each fuse set even if fuse cutting is not performed, and fuse cutting operations are performed once at the end of the test. The conventional technique has required a replacement information holding circuit and a fuse selection circuit, both of which are dedicated for changing the order of fuse selection, and an address signal for fuse selection. However, in this embodiment, selection of the next fuse is made based on the replacement fuse cutting information of a replacement control circuit to be selected. Accordingly, there is no longer a need to have a dedicated replacement information holding circuit and a dedicated fuse selection circuit, and an address signal (BSEL) for fuse selection. Thereby, a small chip size can be accomplished. When comparing the same configuration examples, for example, the necessary number of fuses 4×4 sets+2=18 pieces is reduced to the number of fuses 3×4 sets=12 pieces, according to the embodiment. As a result, the number of fuses decreases to 12/18, which results in a size reduction effect of 67%. 

1. A semiconductor memory device comprising: a fuse circuit having a plurality of fuse elements; and a fuse selection circuit connected to an internal address signal line that receives an address signal externally inputted, wherein the fuse circuit is connected to the fuse selection circuit to receive an output from the fuse selection circuit, is supplied with an externally inputted trigger signal that permits nonvolatile recording of the fuse elements, and, in response to the output and the trigger signal, records the fuse element corresponding to the internal address signal line among the plurality of fuse elements while recording at least one of the plurality of fuse elements other than the fuse element thus recorded.
 2. The semiconductor memory device according to claim 1, wherein the output of the fuse selection circuit includes: an element specification signal to specify a certain one among the fuse elements in response to the internal address signal line; and a fuse circuit specification signal to specify whether to record the fuse element in the fuse circuit.
 3. The semiconductor memory device according to claim 2, wherein the fuse circuit outputs a state signal showing a recording state of the at least one fuse element, and the fuse selection circuits generate the fuse circuit specification signal in response to the receipt of the state signal.
 4. The semiconductor memory device according to claim 3, in which the fuse circuit is a first fuse circuit, the state signal is a first state signal, the fuse selection circuit is a first fuse selection circuit, and the output of the first fuse selection circuit is a first output, the semiconductor memory device further comprising: a second fuse circuit having another plurality of fuse elements; and a second fuse selection circuit connected to the second fuse circuit and to the internal address signal line, wherein the second fuse circuit receives a second output from the second fuse selection circuit, is supplied with the trigger signal, and, in response to the second output and the trigger signal, records the fuse element corresponding to the internal address signal line among the other fuse elements while recording at least one of the other fuse elements other than the fuse element thus recorded.
 5. The semiconductor memory device according to claim 4, wherein the second fuse circuit outputs a second state signal showing a recording state of the at least one fuse element, and the second fuse selection circuit is connected to the first fuse circuit, receives the first state signal and the second state signal, and generates the second output in response to specified logic of the first and second state signals.
 6. The semiconductor memory device according to claim 5, still further comprising: a first latch circuit that is connected between the first fuse selection circuit and the first fuse circuit, receives and holds the first output, and then provides the first output to the first fuse circuit; and a second latch circuit that is connected between the second fuse selection circuit and the second fuse circuit, receives and holds the second output, and then provides the second output to the second fuse circuit, wherein each of the first and second latch circuits includes: an element specification latch corresponding to the element specification signal; and a fuse circuit specification latch corresponding to the fuse circuit specification signal, the fuse circuit specification latch of the first latch circuit is set in response to a value of the fuse circuit specification latch of the first latch circuit, and the fuse circuit specification latch of the second latch circuit is set in response to a value of the fuse circuit specification latch of the second latch circuit, and to the fuse circuit specification latch of the first latch circuit.
 7. The semiconductor memory device according to claim 6, wherein after both of the element specification latch and the fuse circuit specification latch of each of the first and the second latch circuits are set, a corresponding one of the first and the second fuse circuits is provided with an output of each of these latches in parallel, and records in each of the fuse elements in response to the trigger signal in common. 